For the fifth time, experts in plasma analysis are meeting for a joint workshop to discuss established and new methods for process monitoring of plasma-based coating and etching processes. The basic idea behind the event is to refresh basic knowledge about plasma and plasma analysis. Three key principles of investigation – (1) the analysis of current, voltage and phase, (2) spectroscopic methods, and (3) probes and mass spectrometry for analyzing particles in the gas phase – will kick off the event. The focus will be on both the scientific fundamentals and the industrial application perspective from companies.

During the workshop, example scenarios and different investigation methods for sputtering processes on the one hand and etching processes on the other will be examined in detail. Process-specific insights based on practical examples will provide participants with specific guidance for their applications. The aim is to bridge the gap between the indispensable measurement methods required for process monitoring and quality control and in-depth analysis for process development and fault analysis, where detailed knowledge of processes is necessary, process understanding plays a major role and light needs to be shed on process optimization.

The program is rounded off with contributions to the discussion on future issues in the field of plasma catalysis and the use of artificial intelligence for fast and accurate data evaluation and process control. What possibilities and opportunities are offered by the combination of simulation and artificial intelligence? Where is it worth the effort, and is there even enough data available for AI to work with? We have invited AI experts. Take advantage of this opportunity and get some no-obligation advice.

The event will be accompanied by the Fraunhofer Institute for Electron Beam and Plasma Technology FEP in Dresden, which will give visitors insights into practical applications during a tour and present suitable service offerings for companies. During the evening event, you can experience the charm of Dresden's Christmas market on Neumarkt while enjoying a winter mulled wine. Arrive early and enjoy a stroll through the Christmas market at the Frauenkirche. Take a look at the program and register now!

More information you can find here: https://efds.org/en/event/workshop-diag-2025/

Organizer: European Society of Thin Films EFDS